The KEIL .h files for ATMEL SAM S/E/V (ex. same70q21.h) have incorrect definitions of #define IFLASH_LOCK_REGION_SIZE (8192u) and #define CHIP_FREQ_CPU_MAX (120000000UL)
Should be #define IFLASH_LOCK_REGION_SIZE (16384u) and #define CHIP_FREQ_CPU_MAX (300000000UL)