How to make a 1 us interrupt timer in stm32f103?

Hello, i want to make a 1 us interrupt timer in for my stm32f103 in timer 2, i could make 10 us n 5 us, but in lower than that its not working truely! what should i do?!

/* TIM2 init function */
static void MX_TIM2_Init(void)
{

  TIM_ClockConfigTypeDef sClockSourceConfig;
  TIM_MasterConfigTypeDef sMasterConfig;
	
  htim2.Instance = TIM2;
  htim2.Init.Prescaler = 0;
  htim2.Init.CounterMode = TIM_COUNTERMODE_UP;
  htim2.Init.Period = 359;
	
  htim2.Init.ClockDivision = TIM_CLOCKDIVISION_DIV1;
  htim2.Init.AutoReloadPreload = TIM_AUTORELOAD_PRELOAD_DISABLE;
  if (HAL_TIM_Base_Init(&htim2) != HAL_OK)
  {
    _Error_Handler(__FILE__, __LINE__);
  }

  sClockSourceConfig.ClockSource = TIM_CLOCKSOURCE_INTERNAL;
  if (HAL_TIM_ConfigClockSource(&htim2, &sClockSourceConfig) != HAL_OK)
  {
    _Error_Handler(__FILE__, __LINE__);
  }

  sMasterConfig.MasterOutputTrigger = TIM_TRGO_RESET;
  sMasterConfig.MasterSlaveMode = TIM_MASTERSLAVEMODE_DISABLE;
  if (HAL_TIMEx_MasterConfigSynchronization(&htim2, &sMasterConfig) != HAL_OK)
  {
    _Error_Handler(__FILE__, __LINE__);
  }

}

it's workin with this for 5 us.