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Could not load Flash of EFM32 with ULinkPro.

Gentlemen!
I try to use Keil ULinkPro for debug program for EFM32G880F128. When I try to load my program I received the message Error. Invalid ROM table. The Settings in Keil show me the ID Code of the microcontroller 0x2BA01477, it is right. I checked by oscilloscope SWDIO, SWDCLK - the tact and data are present.
Could you help me to understand the reason of the failure?

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