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AT91SAM7S64 Error Download To Flash

HI,

I'm using the AT91SAM7S64 Evaluation Kit from Atmel (with Demoprog Hello). Debugging works only with RAM. When i download the program to Flash, i receive the following message:

Load "C:\\Tmp\\Atmel\\AT91SAM7S\\Hello\\Flash\\Hello"
Programming Done.
Contents missmatch at: 00100000H (Flash=00H Required=18H) !
Contents missmatch at: 00100001H (Flash=00H Required=F0H) !
... and so on.

In the Flash COnfiguration Menu i have selected 'Use Target Driver for Flash Programming,ULINK ARM Debugger and in the Settings for Programming Algorithm AT91SAM7S64 FLASH. The Ram for Algorithm is 0x200000 and the size is 0x800.

Can you help me?

Thank you
Eugen