can't compile startup_stm32u575xx.s with µVision 5 Compiler 6.7

I cant compile the automatically to my project added startupfile startup_stm32u575xx.s.

*** Using Compiler 'V6.7', folder: 'C:\imc\crossgcc\Keil_v5\ARM\ARMCLANG\Bin'
RTE/Device/STM32U575VGTxQ/startup_stm32u575xx.s(25): error: invalid instruction
                PRESERVE8
                ^
RTE/Device/STM32U575VGTxQ/startup_stm32u575xx.s(26): error: invalid instruction
                THUMB
                ^
RTE/Device/STM32U575VGTxQ/startup_stm32u575xx.s(29): error: unexpected token in argument list
; Vector Table Mapped to Address 0 at Reset
               ^
RTE/Device/STM32U575VGTxQ/startup_stm32u575xx.s(30): error: invalid instruction
                AREA RESET, DATA, READONLY
                ^
RTE/Device/STM32U575VGTxQ/startup_stm32u575xx.s(31): error: unexpected token in operand
                IMPORT |Image$$ARM_LIB_STACK$$ZI$$Limit|
                       ^
RTE/Device/STM32U575VGTxQ/startup_stm32u575xx.s(32): error: unexpected token in operand
                IMPORT |Image$$ARM_LIB_STACK$$ZI$$Base|
                       ^
RTE/Device/STM32U575VGTxQ/startup_stm32u575xx.s(33): error: invalid instruction
                EXPORT __Vectors
                ^
RTE/Device/STM32U575VGTxQ/startup_stm32u575xx.s(34): error: invalid instruction
                EXPORT __Vectors_End

and so on

Can anyone help?