Flash Download failed - "Cortex-M3" ATSAM3S2A

Hi there,
I have a ulink2 and a ATSAM3S2A with 128kb Flash.
The connection via JTAG/SW seems to be okay, I see the device name and the IDCode in the Debug window.
When I start to download the code into the flash I get "Full Chip Erase Failed!" and "Cannot access Memory". I have already checked the adress range (0x00400000, Size 0x00020000) and the RAM for algorithm (0x20000000, Size 0x0800). Also I reduced the Max Clock (JTAG-Adapter), down to 100KHz and I've tried to download the code without a erase or checked "Download to Flash" in "Download options". Nothing solves the problem.

Has anyone an idea?

Thank you very much in advance for your efforts!

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