C164 OTPprogrammind failed

Hello!
Could somebody help me (again)?
I programmed a C164 BC-Step with the MEMtool.
Something was programmed,but verifying shows a lot of differences (about 800).I looked at the programmed data:there are some parts wich are correct,but are programmed about 20hex behind the address it should...
Please answer me if somebody knows something about this!?
Thanks a lot hannes

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